Microfabrications

Pagina 1

Among the B,C,D,E, D is correct : reliable but not easy and thus expensive. Crustallinity it’s not true, because glass in amorfous in general. Ease of anisotropic etching is not true because its amorfous again, anistropic etching cannot be performed. B is false in the second part. Ceramics are used for packaging, but because of their lower thermal expansion. C and D are false. The cost are higher for C, and there are no further advantages for metallization. A and C false. Electron beam are used. D is false because the throughput is lower not higher, because we work point by point (serial process) and not a parallel process F false. It uses magnetic lensens, not masks (it is actually a maskless approach). C. NOT always a serial process (digital micromirror is one example). D. Yes. It is still a photolitographic method. The wrong part is that it is not high-resolution. It modifies the edges! Not very good resolution A . Fastest for sure, but not the cheapest! A false because the technique is not indicated to have a small sample series B no, ment for plastic materials A is false because it comprises at least 2 metal pieces, because you need to open them. It requires both high pressure and T  the D is correct